Publication detail

Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries

Navascués, P Buchtelová, M Zajícková, L Rupper, P Hegemann, D

Original Title

Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries

Type

journal article in Web of Science

Language

English

Original Abstract

Hexamethyldisiloxane (HMDSO) low-pressure plasmas are known for their versatility in the deposition of plasma polymer films (PPFs) with different properties and applications. Although they have been studied for decades, the reaction mechanisms of plasma polymer formation leave open questions, particularly when deposition on 3D materials with complex geometries such as cavities and undercuts is considered. In the present study, two configurations named "cavity" and "undercut" have been selected to study the influence of diffusion of film forming species and surface reactivity in HMDSO plasmas without and with O2 admixture. A varying spatial chemical composition of the plasma polymer deposit along the penetration depth of the studied configurations indicates different sticking probabilities of the film-forming species. Furthermore, although ion-induced effects are usually only considered for direct plasma exposure, the obtained results and additional etching experiments reveal that the contribution of high-energy particles might still be considered underneath small openings. Finally, the relevance of oxidizing chemical reactions at the surface inside the configurations is clarified when O2 is added to the plasma.

Keywords

Plasma polymerization; HMDSO; ATR-FTIR; Surface oxidation

Authors

Navascués, P; Buchtelová, M; Zajícková, L; Rupper, P; Hegemann, D

Released

1. 2. 2024

Publisher

ELSEVIER

Location

AMSTERDAM

ISBN

1873-5584

Periodical

APPLIED SURFACE SCIENCE

Year of study

645

Number

158824

State

Kingdom of the Netherlands

Pages count

9

URL

https://www.sciencedirect.com/science/article/pii/S0169433223025047

Full text in the Digital Library

http://hdl.handle.net/11012/254273

BibTex

@article{BUT196712,
  author="Paula {Navascues} and Martina {Janůšová} and Lenka {Zajíčková} and Patrick {Rupper} and Dirk {Hegemann}",
  title="Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries",
  journal="APPLIED SURFACE SCIENCE",
  year="2024",
  volume="645",
  number="158824",
  pages="9",
  doi="10.1016/j.apsusc.2023.158824",
  issn="1873-5584",
  url="https://www.sciencedirect.com/science/article/pii/S0169433223025047"
}