Publication detail

Nanometer-scale interface instability in silicon oxide/polymer sandwich structures detected after two years

BRÁNECKÝ, M. ROMANENKO, O. ABOUALIGALEDARI, N. PLICHTA, T. NOVÁK, J. MACKOVÁ, A. ČECH, V.

Original Title

Nanometer-scale interface instability in silicon oxide/polymer sandwich structures detected after two years

Type

journal article in Web of Science

Language

English

Original Abstract

Nonthermal plasma-deposited glassy silica is often used as a gas barrier film to protect polymer material in many applications. This study revealed that glassy silica is a slightly porous material (3 vol.%) with small pores (2.5 nm) formed during thin film deposition. The infrared spectrum shows that the as-deposited plasma silica contains gaseous carbon dioxide, which is likely encapsulated in the pores. It can be assumed that these CO2 molecules diffuse from the silica layer through the silicon oxide/polymer interface into the protected polymer material. The low crosslinked polymer material is then locally oxidized by CO2 , which changes its chemical and physical properties. This means that the silicon oxide/polymer interface gradually moves into the polymer material over time. CO2 diffusion is therefore considered responsible for a shift of the silicon oxide/polymer interface by 30 – 35 nm after 27 months.

Keywords

plasma-enhanced chemical vapor deposition (PECVD); interface; porosity; diffusion; silica; polymer; carbon dioxide

Authors

BRÁNECKÝ, M.; ROMANENKO, O.; ABOUALIGALEDARI, N.; PLICHTA, T.; NOVÁK, J.; MACKOVÁ, A.; ČECH, V.

Released

22. 4. 2025

Publisher

Elsevier

ISBN

0254-0584

Periodical

MATERIALS CHEMISTRY AND PHYSICS

Year of study

341

Number

130935

State

Swiss Confederation

Pages from

1

Pages to

9

Pages count

9

URL

https://www.sciencedirect.com/science/article/pii/S0254058425005814

BibTex

@article{BUT198384,
  author="Martin {Bránecký} and Oleksandr {Romanenko} and Naghmeh {Aboualigaledari} and Tomáš {Plichta} and Jiří {Novák} and Anna {Macková} and Vladimír {Čech}",
  title="Nanometer-scale interface instability in silicon oxide/polymer sandwich structures detected after two years",
  journal="MATERIALS CHEMISTRY AND PHYSICS",
  year="2025",
  volume="341",
  number="130935",
  pages="1--9",
  doi="10.1016/j.matchemphys.2025.130935",
  issn="0254-0584",
  url="https://www.sciencedirect.com/science/article/pii/S0254058425005814"
}