Detail publikačního výsledku
Layered a-CSi:H/a-CSiO:H nanocomposites
BRÁNECKÝ, M.; ČECH, V.
Original Title
Layered a-CSi:H/a-CSiO:H nanocomposites
English Title
Layered a-CSi:H/a-CSiO:H nanocomposites
Type
Abstract
Original Abstract
Layered nanocomposites with a controlled distribution of mechanical properties across the nanostructure were constructed from oxygen-free (a-CSi:H) and oxygen-bound (a-CSiO:H) individual layers. These were deposited at different power from pure tetravinylsilane and tetravinylsilane in a mixture with oxygen gas using plasma-enhanced chemical vapor deposition operating in pulsed mode. Dynamic nanoindentation (Modulus Mapping) was employed to characterize the distribution of mechanical properties across the layered nanocomposites. XPS depth profiling using argon gas cluster ion beams was used to determine the atomic concentration of carbon, silicon, and oxygen in the individual layers forming the nanocomposite. The high energy-resolution XPS spectra (C 1s, Si 2p, and O 1s) were analyzed to gain more insight into bonding species formed in layered nanocomposite.
English abstract
Layered nanocomposites with a controlled distribution of mechanical properties across the nanostructure were constructed from oxygen-free (a-CSi:H) and oxygen-bound (a-CSiO:H) individual layers. These were deposited at different power from pure tetravinylsilane and tetravinylsilane in a mixture with oxygen gas using plasma-enhanced chemical vapor deposition operating in pulsed mode. Dynamic nanoindentation (Modulus Mapping) was employed to characterize the distribution of mechanical properties across the layered nanocomposites. XPS depth profiling using argon gas cluster ion beams was used to determine the atomic concentration of carbon, silicon, and oxygen in the individual layers forming the nanocomposite. The high energy-resolution XPS spectra (C 1s, Si 2p, and O 1s) were analyzed to gain more insight into bonding species formed in layered nanocomposite.
Keywords
Layered nanocomposite; mechanical properties; chemical properties; PECVD
Key words in English
Layered nanocomposite; mechanical properties; chemical properties; PECVD
Authors
BRÁNECKÝ, M.; ČECH, V.
Released
14.11.2019
Location
Luxembourg
Book
6th International Plasma Science and Interfaces workshop Luxembourg
Pages count
1
Full text in the Digital Library
BibTex
@misc{BUT160081,
author="Martin {Bránecký} and Vladimír {Čech}",
title="Layered a-CSi:H/a-CSiO:H nanocomposites",
booktitle="6th International Plasma Science and Interfaces workshop
Luxembourg
",
year="2019",
pages="1",
address="Luxembourg",
note="Abstract"
}