Publication detail
Conductively Coated 3D Printed Emitters for Electron Devices
BURDA, D. KANDRA, M. ALLAHAM, M. KNÁPEK, A. MATĚJKA, M.
Original Title
Conductively Coated 3D Printed Emitters for Electron Devices
Type
conference paper
Language
English
Original Abstract
The additive manufacturing method is used to produce electron emitters using a two-photon laser printer (2FL). Structures are manufactured on a silicon wafer from photosensitive resins, which form a base shape of the structures on top of which a conductive layer is deposited afterward. These structures can take on various geometries, including pyramidal, conical, or ellipsoidal shapes. Good results in terms of mechanical stability were achieved for structures of square pyramids, 50 mu m in height. The structures on chips are measured in a field emission experiment chamber operated under an ultrahigh vacuum (similar to 10(-7) Pa).
Keywords
cold field emission; two-photon lithography; 2PL; FEM; electron device
Authors
BURDA, D.; KANDRA, M.; ALLAHAM, M.; KNÁPEK, A.; MATĚJKA, M.
Released
1. 12. 2024
Publisher
IEEE
Location
NEW YORK
ISBN
979-8-3503-7976-1
Book
International Vacuum Nanoelectronics Conference
ISBN
2164-2370
Periodical
International Vacuum Nanoelectronics Conference
State
United States of America
Pages from
1
Pages to
2
Pages count
2
URL
BibTex
@inproceedings{BUT197226,
author="Daniel {Burda} and Mário {Kandra} and Mohammad Mahmoud Mohammad {Allaham} and Alexandr {Knápek} and Milan {Matějka}",
title="Conductively Coated 3D Printed Emitters for Electron Devices",
booktitle="International Vacuum Nanoelectronics Conference",
year="2024",
journal="International Vacuum Nanoelectronics Conference",
pages="2",
publisher="IEEE",
address="NEW YORK",
doi="10.1109/IVNC63480.2024.10652319",
isbn="979-8-3503-7976-1",
issn="2164-2370",
url="https://ieeexplore.ieee.org/document/10652319"
}