Detail publikace

Conductively Coated 3D Printed Emitters for Electron Devices

BURDA, D. KANDRA, M. ALLAHAM, M. KNÁPEK, A. MATĚJKA, M.

Originální název

Conductively Coated 3D Printed Emitters for Electron Devices

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The additive manufacturing method is used to produce electron emitters using a two-photon laser printer (2FL). Structures are manufactured on a silicon wafer from photosensitive resins, which form a base shape of the structures on top of which a conductive layer is deposited afterward. These structures can take on various geometries, including pyramidal, conical, or ellipsoidal shapes. Good results in terms of mechanical stability were achieved for structures of square pyramids, 50 mu m in height. The structures on chips are measured in a field emission experiment chamber operated under an ultrahigh vacuum (similar to 10(-7) Pa).

Klíčová slova

cold field emission; two-photon lithography; 2PL; FEM; electron device

Autoři

BURDA, D.; KANDRA, M.; ALLAHAM, M.; KNÁPEK, A.; MATĚJKA, M.

Vydáno

1. 12. 2024

Nakladatel

IEEE

Místo

NEW YORK

ISBN

979-8-3503-7976-1

Kniha

International Vacuum Nanoelectronics Conference

ISSN

2164-2370

Periodikum

International Vacuum Nanoelectronics Conference

Stát

Spojené státy americké

Strany od

1

Strany do

2

Strany počet

2

URL

https://ieeexplore.ieee.org/document/10652319

BibTex

@inproceedings{BUT197226,
  author="Daniel {Burda} and Mário {Kandra} and Mohammad Mahmoud Mohammad {Allaham} and Alexandr {Knápek} and Milan {Matějka}",
  title="Conductively Coated 3D Printed Emitters for Electron Devices",
  booktitle="International Vacuum Nanoelectronics Conference",
  year="2024",
  journal="International Vacuum Nanoelectronics Conference",
  pages="2",
  publisher="IEEE",
  address="NEW YORK",
  doi="10.1109/IVNC63480.2024.10652319",
  isbn="979-8-3503-7976-1",
  issn="2164-2370",
  url="https://ieeexplore.ieee.org/document/10652319"
}