Publication result detail
Optical constants of plasma-polymerized tetravinylsilane films
ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.
Original Title
Optical constants of plasma-polymerized tetravinylsilane films
English Title
Optical constants of plasma-polymerized tetravinylsilane films
Type
Paper in proceedings (conference paper)
Original Abstract
We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.
English abstract
We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.
Keywords
plasma polymerization, optical properties, ellipsometry
Key words in English
plasma polymerization, optical properties, ellipsometry
Authors
ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.
Released
13.12.2007
ISBN
978-4-9903773-2-8
Book
18th International Symposium on Plasma Chemistry
Pages from
1
Pages to
4
Pages count
4
BibTex
@inproceedings{BUT28338,
author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
title="Optical constants of plasma-polymerized tetravinylsilane films",
booktitle="18th International Symposium on Plasma Chemistry",
year="2007",
pages="1--4",
isbn="978-4-9903773-2-8"
}