Detail publikačního výsledku
Mechanical properties of plasma polymer films
ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.
Original Title
Mechanical properties of plasma polymer films
English Title
Mechanical properties of plasma polymer films
Type
Paper in proceedings (conference paper)
Original Abstract
Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.
English abstract
Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.
Keywords
mechanical properties
Key words in English
mechanical properties
Authors
ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.
Released
13.12.2007
Book
Lokální mechanické vlastnosti
Pages from
1
Pages to
5
Pages count
5
Full text in the Digital Library
BibTex
@inproceedings{BUT28342,
author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
title="Mechanical properties of plasma polymer films",
booktitle="Lokální mechanické vlastnosti",
year="2007",
pages="1--5"
}