Publication result detail
Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power
BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.
Original Title
Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power
English Title
Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power
Type
Paper in proceedings (conference paper)
Original Abstract
The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.
English abstract
The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.
Key words in English
thin films, plasma polymerization, FTIR, ESCA/XPS, scratch test, modulus
Authors
BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.
Released
01.01.2001
Publisher
GREMI, CNRS/University of Orleans
Location
Orleans, France
Book
15th Int. Symposium on Plasma Chemistry
Pages from
1747
Pages count
7
BibTex
@inproceedings{BUT3791,
author="Radka {Bálková} and Radek {Přikryl} and Ota {Salyk}",
title="Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power",
booktitle="15th Int. Symposium on Plasma Chemistry",
year="2001",
pages="7",
publisher="GREMI, CNRS/University of Orleans",
address="Orleans, France"
}