Publication result detail

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

ČECH, V.

Original Title

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

English Title

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.

English abstract

Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.

Key words in English

thin films, plasma polymerization,thermogravimetric analysis, FTIR, ESCA/XPS

Authors

ČECH, V.

Released

01.01.2001

ISBN

0021-8995

Periodical

JOURNAL OF APPLIED POLYMER SCIENCE

Volume

82

Number

9

State

United States of America

Pages from

2106

Pages count

7

BibTex

@article{BUT39848,
  author="Vladimír {Čech}",
  title="Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization",
  journal="JOURNAL OF APPLIED POLYMER SCIENCE",
  year="2001",
  volume="82",
  number="9",
  pages="7",
  issn="0021-8995"
}