Publication result detail
Plasma Diagnostic During Deposition Processes of Silane Based Thin Films
Rašková, Z., Brandejs, K., Krčma, F., Vaněk, J.
Original Title
Plasma Diagnostic During Deposition Processes of Silane Based Thin Films
English Title
Plasma Diagnostic During Deposition Processes of Silane Based Thin Films
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
Our work deals with the identification of the intensive spectral lines and bands measured during the plasma deposition using the hexamethyldisiloxane (HMDSO) and the tetravinylsilane (TVS) as monomer. The deposition processes were carried out in a continual regime as well as in a pulsed regime with the varied relative pulse duration. At first, the pure monomers were used. Furthermore, tetravinylsilane was mixed in various ratios with oxygen, the CH4 + H2 gas mixture was added to hexamethyldisiloxane. We observed a lot of changes in intensity and character of spectra with increasing pulse duration, with increasing oxygen flow rate. Oxygen has an important role for the creation of various fragments and cyclic oligomers. In the next part of experiment, exhaust gas was investigated by gas-chromatography and mass spectrometry (GC-MS). Oligomers with complex structure were identified.
English abstract
Our work deals with the identification of the intensive spectral lines and bands measured during the plasma deposition using the hexamethyldisiloxane (HMDSO) and the tetravinylsilane (TVS) as monomer. The deposition processes were carried out in a continual regime as well as in a pulsed regime with the varied relative pulse duration. At first, the pure monomers were used. Furthermore, tetravinylsilane was mixed in various ratios with oxygen, the CH4 + H2 gas mixture was added to hexamethyldisiloxane. We observed a lot of changes in intensity and character of spectra with increasing pulse duration, with increasing oxygen flow rate. Oxygen has an important role for the creation of various fragments and cyclic oligomers. In the next part of experiment, exhaust gas was investigated by gas-chromatography and mass spectrometry (GC-MS). Oligomers with complex structure were identified.
Keywords
optical spectrum, tetravinylsilane, effective power
Key words in English
optical spectrum, tetravinylsilane, effective power
Authors
Rašková, Z., Brandejs, K., Krčma, F., Vaněk, J.
Released
10.06.2004
Publisher
AV ČR
Location
Praha
Edition
NEuvedeno
ISBN
0011-4626
Periodical
Czechoslovak Journal of Physics
Volume
54
Number
C
State
Czech Republic
Pages from
1036
Pages count
6
BibTex
@article{BUT46187,
author="Zuzana {Rašková} and Kamil {Brandejs} and František {Krčma} and Jan {Vaněk}",
title="Plasma Diagnostic During Deposition Processes of Silane Based Thin Films",
journal="Czechoslovak Journal of Physics",
year="2004",
volume="54",
number="C",
pages="6",
issn="0011-4626"
}