Detail publikačního výsledku

AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS

PŘIKRYL, R.

Original Title

AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS

English Title

AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer

English abstract

Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer

Keywords

PE-CVD, Automation, plasma, deposition

Key words in English

PE-CVD, Automation, plasma, deposition

Authors

PŘIKRYL, R.

RIV year

2010

Released

11.09.2008

Publisher

Chemické Listy

Location

Brno

ISBN

1213-7103

Periodical

CHEMICKE LISTY

Volume

102

Number

15

State

Czech Republic

Pages from

s1261

Pages to

s1262

Pages count

2

URL

Full text in the Digital Library