Publication result detail
AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS
PŘIKRYL, R.
Original Title
AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS
English Title
AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer
English abstract
Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer
Keywords
PE-CVD, Automation, plasma, deposition
Key words in English
PE-CVD, Automation, plasma, deposition
Authors
PŘIKRYL, R.
RIV year
2010
Released
11.09.2008
Publisher
Chemické Listy
Location
Brno
ISBN
1213-7103
Periodical
CHEMICKE LISTY
Volume
102
Number
15
State
Czech Republic
Pages from
s1261
Pages to
s1262
Pages count
2
URL