Detail publikačního výsledku

FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE

STUDÝNKA, J.; ČECHALOVÁ, B.; ČECH, V.

Original Title

FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE

English Title

FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Functional coatings constructed as bi-layer or multilayer (10-layer) structures were deposited from pure tetravinylsilane monomer or a mixture of monomer and oxygen gas using plasma-enhanced chemical vapor deposition. Selected deposition conditions were used to deposit the plasma polymer layer of A and B type, which differ in chemical and physical properties markedly. The thickness of the particular layer in layered structure was 0.1 - 0.9 micron at a total coating thickness of 1 micron. Spectroscopic ellipsometry enabled us to differentiate the particular layers in structured coatings and analyze them.

English abstract

Functional coatings constructed as bi-layer or multilayer (10-layer) structures were deposited from pure tetravinylsilane monomer or a mixture of monomer and oxygen gas using plasma-enhanced chemical vapor deposition. Selected deposition conditions were used to deposit the plasma polymer layer of A and B type, which differ in chemical and physical properties markedly. The thickness of the particular layer in layered structure was 0.1 - 0.9 micron at a total coating thickness of 1 micron. Spectroscopic ellipsometry enabled us to differentiate the particular layers in structured coatings and analyze them.

Keywords

multilayer, PECVD, tetravinylsilane, ellipsometry, FTIR

Key words in English

multilayer, PECVD, tetravinylsilane, ellipsometry, FTIR

Authors

STUDÝNKA, J.; ČECHALOVÁ, B.; ČECH, V.

RIV year

2010

Released

22.12.2008

ISBN

0257-8972

Periodical

SURFACE & COATINGS TECHNOLOGY

Volume

202

Number

22

State

Swiss Confederation

Pages from

5505

Pages to

5507

Pages count

3

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@article{BUT48291,
  author="Jan {Studýnka} and Božena {Čechalová} and Vladimír {Čech}",
  title="FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE",
  journal="SURFACE & COATINGS TECHNOLOGY",
  year="2008",
  volume="202",
  number="22",
  pages="5505--5507",
  issn="0257-8972"
}