Publication result detail
Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation
BARTOŠÍK, M.; KOLÍBAL, M.; ČECHAL, J.; MACH, J.; ŠIKOLA, T.
Original Title
Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation
English Title
Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.
English abstract
We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.
Keywords
Selective growth; Local anodic oxidation; Gallium; Patterning
Key words in English
Selective growth; Local anodic oxidation; Gallium; Patterning
Authors
BARTOŠÍK, M.; KOLÍBAL, M.; ČECHAL, J.; MACH, J.; ŠIKOLA, T.
RIV year
2010
Released
01.10.2009
ISBN
1533-4880
Periodical
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume
9
Number
10
State
United States of America
Pages from
5887
Pages to
5890
Pages count
4
BibTex
@article{BUT48787,
author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola}",
title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
year="2009",
volume="9",
number="10",
pages="5887--5890",
issn="1533-4880"
}