Publication result detail
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
TRIVEDI, R.; ČECH, V.
Original Title
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
English Title
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
A plasma-polymerized tetravinylsilane film of about 1 micron thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Near-surface mechanical properties such as the reduced modulus and hardness of the plasma polymer film were investigated using conventional depth-sensing nanoindentation as well as load-partial-unload (cyclic) nanoindentation. The study found an influence of the dwell time and loading/unloading rate on the determined values of the reduced modulus, hardness, and contact depth.
English abstract
A plasma-polymerized tetravinylsilane film of about 1 micron thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Near-surface mechanical properties such as the reduced modulus and hardness of the plasma polymer film were investigated using conventional depth-sensing nanoindentation as well as load-partial-unload (cyclic) nanoindentation. The study found an influence of the dwell time and loading/unloading rate on the determined values of the reduced modulus, hardness, and contact depth.
Keywords
plasma polymerization; thin films; nanoindentation
Key words in English
plasma polymerization; thin films; nanoindentation
Authors
TRIVEDI, R.; ČECH, V.
RIV year
2011
Released
27.12.2010
ISBN
0257-8972
Periodical
SURFACE & COATINGS TECHNOLOGY
Volume
205
Number
Suppl 1
State
Swiss Confederation
Pages from
286
Pages to
289
Pages count
4
BibTex
@article{BUT50758,
author="Rutul Rajendra {Trivedi} and Vladimír {Čech}",
title="Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques",
journal="SURFACE & COATINGS TECHNOLOGY",
year="2010",
volume="205",
number="Suppl 1",
pages="286--289",
issn="0257-8972"
}