Publication result detail
Perspectives of a-SiOC:H thin films
ČECH, V.
Original Title
Perspectives of a-SiOC:H thin films
English Title
Perspectives of a-SiOC:H thin films
Type
Abstract
Original Abstract
We would like to introduce plasma polymerization as a technique capable to prepare high quality a-SiOC:H thin films with high reproducibility. The hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin film can be prepared using organosilicon precursors and physico-chemical properties of the film are controlled by deposition conditions. Development of tailored materials in a form of single films or layered structures has great potential for multicomponent, optical and electronic devices.
English abstract
We would like to introduce plasma polymerization as a technique capable to prepare high quality a-SiOC:H thin films with high reproducibility. The hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin film can be prepared using organosilicon precursors and physico-chemical properties of the film are controlled by deposition conditions. Development of tailored materials in a form of single films or layered structures has great potential for multicomponent, optical and electronic devices.
Keywords
thin film; plasma polymerization
Key words in English
thin film; plasma polymerization
Authors
ČECH, V.
Released
01.10.2005
Location
Sant Feliu, Španělsko
BibTex
@misc{BUT60278,
author="Vladimír {Čech}",
title="Perspectives of a-SiOC:H thin films",
year="2005",
address="Sant Feliu, Španělsko",
note="Abstract"
}