Publication result detail
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
TRIVEDI, R.; ČECH, V.
Original Title
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
English Title
Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques
Type
Abstract
Original Abstract
A plasma-polymerized tetravinylsilane film of about 1 micron thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Near-surface mechanical properties such as the reduced modulus and hardness of the plasma polymer film were investigated using the conventional depth-sensing nanoindentation technique as well as the load-partial-unload (cyclic) nanoindentation technique. The study found an influence of the dwell time and loading/unloading rate on the determined values of the reduced modulus, hardness, and contact depth.
English abstract
A plasma-polymerized tetravinylsilane film of about 1 micron thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Near-surface mechanical properties such as the reduced modulus and hardness of the plasma polymer film were investigated using the conventional depth-sensing nanoindentation technique as well as the load-partial-unload (cyclic) nanoindentation technique. The study found an influence of the dwell time and loading/unloading rate on the determined values of the reduced modulus, hardness, and contact depth.
Keywords
plasma polymerization; thin films; nanoindentation
Key words in English
plasma polymerization; thin films; nanoindentation
Authors
TRIVEDI, R.; ČECH, V.
RIV year
2010
Released
22.12.2009
Book
Book of Abstracts, 7th AEPSE 2009, Busan
Pages from
1
Pages to
1
Pages count
1
BibTex
@misc{BUT60907,
author="Rutul Rajendra {Trivedi} and Vladimír {Čech}",
title="Mechanical properties of plasma polymer film evaluated by conventional and alternative nanoindentation techniques",
booktitle="Book of Abstracts, 7th AEPSE 2009, Busan",
year="2009",
pages="1--1",
note="Abstract"
}