Publication result detail
A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation
SALYK, O., SCHAUER, F., ZMEŠKAL, O., ZUBÍK, K., POLCER, J., BOUŠEK, J.
Original Title
A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation
English Title
A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation
Type
Paper in proceedings (conference paper)
Original Abstract
The deposition of a-Si:H by electron beam evaporation and ion beam hydrogenation is described. The films are characterized by density, hydrogen content and refractive index and by SIMS and AES analysis. The transport properties were determined by conductivity and photoconductivity measurements and using the temperature modulated space charge limited currents method (TM-SCLC)
English abstract
The deposition of a-Si:H by electron beam evaporation and ion beam hydrogenation is described. The films are characterized by density, hydrogen content and refractive index and by SIMS and AES analysis. The transport properties were determined by conductivity and photoconductivity measurements and using the temperature modulated space charge limited currents method (TM-SCLC)
Key words in English
amorphous hydrogenated silicon, evaporation, ion beam
Authors
SALYK, O., SCHAUER, F., ZMEŠKAL, O., ZUBÍK, K., POLCER, J., BOUŠEK, J.
Released
01.09.1989
Location
Užhorod
Book
IX. conf. Non-Crystalline Semiconductors 89
Pages from
III. -114