Applied result detail
Zobrazovací in situ reflektometr
SPOUSTA, J.; URBÁNEK, M.; ŠIKOLA, T.; CHMELÍK, R.
Original Title
Zobrazovací in situ reflektometr
English Title
Imaging Reflectometer
Type
Functioning sample
Abstract
Monitorování plošné homogenity optických vlastností tenkých vrstev.
Abstract in English
Optical device for monitoring of surface homogeneity of thin films
Keywords
thin films, in situ analysis, optical properties, reflectometer
Key words in English
thin films, in situ analysis, optical properties, reflectometer
Location
A2/518
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