Publication result detail
Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
RAŠKOVÁ, Z., ŠORMOVÁ, H., HAVELKOVÁ, I., KRČMA, F., VANĚK, J., PŘIKRYL, R., ČECH, V.
Original Title
Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
English Title
Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
Type
Paper in proceedings (conference paper)
Original Abstract
The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.
English abstract
The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.
Keywords
Plasma deposition, optical emission spectroscopy, organosilicones
Key words in English
Plasma deposition, optical emission spectroscopy, organosilicones
Authors
RAŠKOVÁ, Z., ŠORMOVÁ, H., HAVELKOVÁ, I., KRČMA, F., VANĚK, J., PŘIKRYL, R., ČECH, V.
Released
15.11.2003
Publisher
MATFYZPRESS
Location
Praha
ISBN
80-86732-18-5
Book
Proceedings of the 12th Annual Conference of Doctoral Students - WDS 2003
Pages from
441
Pages count
5
BibTex
@inproceedings{BUT8852,
author="Zuzana {Rašková} and Hana {Šormová} and Iveta {Havelková} and František {Krčma} and Jan {Vaněk} and Radek {Přikryl} and Vladimír {Čech}",
title="Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films",
booktitle="Proceedings of the 12th Annual Conference of Doctoral Students - WDS 2003",
year="2003",
number="1",
pages="5",
publisher="MATFYZPRESS",
address="Praha",
isbn="80-86732-18-5"
}