Course detail
Physics of plasma and plasma methods
FCH-DCO_FMDAcad. year: 2011/2012
Course introduces with fundamentals of plasma physics and chemistry and mechanism of plasma maintaining in common case - i.e. species ionization and excitation, their diffusion, drift motion and recombination, electrical and thermal properties of plasma. The course interests in plasma generation methods - taxonomy of discharges and plasma diagnostics. More detail overview is devoted to processes in simple molecules gases plasma (He, Ne, Ar, H2, N2, O2). The systematic overview of low pressure plasma technology is presented - sputtering, chemical vapour deposition, plasma polymerization, surface treatment and etching.
The conclusion is devoted to plasma use hazards: health hazard (the ultraviolet radiation and radiofrequency electric field influence, toxic products and its disposal) and material degradation and corrosion.
Language of instruction
Mode of study
Guarantor
Learning outcomes of the course unit
2. Users knowledge of vacuum pumps construction, properties and application.
3. Users knowledge of principles, construction and napplication of vacuometersf plasma diagnostics methods.
4. Users knowledge of
5. Users knowledge of
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
2. Fundamentals of plasma physics
3. Plasma diagnostics methods
4. Plasma generation - gaseous discharges - taxonomy of discharges.
5. Elementary plasma processes
6. Overview of plasma methods
7. Thin films prepared by plasma assistance
8. Plasma polymerization
9. Plasma surface treatment
10. Plasma hazards
Work placements
Aims
2. Introduction with concrete plasma methods used in faculty laboratory and cooperating laboratories at the Masaryk University, Brno University of Technology and institutes of Academy of Science of the Czech Republic.
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
André Ricard : Reactive Plasmas, , 0 (CS)
Boleslav Gross : Technika plazmatu, , 0 (CS)
Recommended reading
Francis F. Chen : Úvod do fyziky plazmatu, , 0 (CS)
André Ricard : Reactive Plasmas, , 0 (CS)
Classification of course in study plans
- Programme DPCP_CHM Doctoral
branch DPCO_CHM , 1 year of study, winter semester, compulsory-optional
- Programme CKCP_CZV lifelong learning
branch CKCO_CZV , 1 year of study, winter semester, compulsory-optional
- Programme DKCP_FCH_4 Doctoral
branch DKCPO_FCH_4 , 2 year of study, winter semester, compulsory-optional
- Programme DPCP_FCH_4 Doctoral
branch DPCPO_FCH_4 , 2 year of study, winter semester, compulsory-optional
- Programme DPCP_CHM Doctoral
branch DPCO_CHM , 2 year of study, winter semester, compulsory-optional
- Programme DKCP_CHM Doctoral
branch DKCO_CHM , 1 year of study, winter semester, compulsory-optional
branch DKCO_CHM , 2 year of study, winter semester, compulsory-optional
Type of course unit
Guided consultation in combined form of studies
Teacher / Lecturer