Detail publikačního výsledku
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; BEHZADI, S.; JONES, F.
Originální název
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
Anglický název
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
Druh
Stať ve sborníku v databázi WoS či Scopus
Originální abstrakt
Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.
Anglický abstrakt
Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.
Klíčová slova
Nanoindentation, Ellipsometry, PACVD, Plasma polymer
Klíčová slova v angličtině
Nanoindentation, Ellipsometry, PACVD, Plasma polymer
Autoři
PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; BEHZADI, S.; JONES, F.
Vydáno
11.03.2005
Nakladatel
Elsevier
Místo
Germany
Kniha
Proceedings of Ninth International Conference on Plasma surface engineering
Edice
2004
Strany od
468
Strany do
471
Strany počet
4
Plný text v Digitální knihovně
BibTex
@inproceedings{BUT15157,
author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Shasa {Behzadi} and Frank {Jones}",
title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
booktitle="Proceedings of Ninth International Conference on Plasma surface engineering",
year="2005",
series="2004",
pages="468--471",
publisher="Elsevier",
address="Germany"
}