Preparation and Characterisation of Thin Films of Antimony Tin Oxide

Preparation and Characterisation of Thin Films of Antimony Tin Oxide

Abstrakt

Liquid composition for antimony doped tin oxide sol-gel deposition was pre- pared. Inorganic precursors of tin and antimony and ATO nanoparticles were used (tin(IV) chloride, antimony(III) chloride). ATO nanoparticles were dispersed in composition. This composition was used for spin-coating deposition of thin films. Composition was shaken for 0 – 8 days on laboratory shaker with 1 mm glass marbles. Set of samples made of 1 – 4 layers was deposited from every shaking period composition. Sheet resistance of prepared samples were examined by four probe sensing. Lowest sheet resistance of 2,83 kΩ/sq was reached. RMS roughness and thickness was measured by contact profilometry and calculated. Roughness range was calculated to 1,0 – 1,4 μm for nonshaken composition set of samples and 0,2 – 0,4 μm for shaken composition sets o samples. Thickness of samples reached 1,1 – 3,6 μm depends on number of layers deposited. Samples were measured on X-ray diffraction (XRD). Transmittance and haze were measured and calculated by UV-VIS spectrometry with integration sphere. Transmittance was ranged between 65 – 82 % depends on wavelength with maximum at 550 nm. Haze of samples was in range of 1 – 6 % depends on wavelength of light measured with minimum at red area and maximum at blue area of Visible spectrum.

Liquid composition for antimony doped tin oxide sol-gel deposition was pre- pared. Inorganic precursors of tin and antimony and ATO nanoparticles were used (tin(IV) chloride, antimony(III) chloride). ATO nanoparticles were dispersed in composition. This composition was used for spin-coating deposition of thin films. Composition was shaken for 0 – 8 days on laboratory shaker with 1 mm glass marbles. Set of samples made of 1 – 4 layers was deposited from every shaking period composition. Sheet resistance of prepared samples were examined by four probe sensing. Lowest sheet resistance of 2,83 kΩ/sq was reached. RMS roughness and thickness was measured by contact profilometry and calculated. Roughness range was calculated to 1,0 – 1,4 μm for nonshaken composition set of samples and 0,2 – 0,4 μm for shaken composition sets o samples. Thickness of samples reached 1,1 – 3,6 μm depends on number of layers deposited. Samples were measured on X-ray diffraction (XRD). Transmittance and haze were measured and calculated by UV-VIS spectrometry with integration sphere. Transmittance was ranged between 65 – 82 % depends on wavelength with maximum at 550 nm. Haze of samples was in range of 1 – 6 % depends on wavelength of light measured with minimum at red area and maximum at blue area of Visible spectrum.

antimony tin oxide, thin layers, spin-coating

antimony tin oxide, thin layers, spin-coating

Bartoš, R; Dzik, P

2022

21.11.2019

Vysoké Učení Technické v Brně, Fakulta Chemická

Brno

978-80-214-5807-9

Studentská odborná konference Chemie je život 2019 - Sborník abstraktů

70

70

1

https://www.fch.vut.cz/vav/konference/sok/vystupy/sbornik-abstraktu-2019-v2-pdf-p188439