Detail publikačního výsledku

Nanoindentation measurements of plasma polymer films

ČECH, V.; STUDÝNKA, J.; JONES, F.

Originální název

Nanoindentation measurements of plasma polymer films

Anglický název

Nanoindentation measurements of plasma polymer films

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

Anglický abstrakt

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

Klíčová slova

nanoindentation, plasma polymerization, thin film

Klíčová slova v angličtině

nanoindentation, plasma polymerization, thin film

Autoři

ČECH, V.; STUDÝNKA, J.; JONES, F.

Vydáno

13.12.2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

1

Strany do

4

Strany počet

4

BibTex

@inproceedings{BUT28335,
  author="Vladimír {Čech} and Jan {Studýnka} and Frank {Jones}",
  title="Nanoindentation measurements of plasma polymer films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}