Detail publikačního výsledku
Physical versus chemical properties of plasma-polymerized a-SiOC:H films
ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.
Originální název
Physical versus chemical properties of plasma-polymerized a-SiOC:H films
Anglický název
Physical versus chemical properties of plasma-polymerized a-SiOC:H films
Druh
Stať ve sborníku v databázi WoS či Scopus
Originální abstrakt
Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.
Anglický abstrakt
Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.
Klíčová slova
thin film, mechanical properties, optical properties, chemical properties
Klíčová slova v angličtině
thin film, mechanical properties, optical properties, chemical properties
Autoři
ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.
Vydáno
13.12.2007
ISBN
978-4-9903773-2-8
Kniha
18th International Symposium on Plasma Chemistry
Strany od
1
Strany do
4
Strany počet
4
Plný text v Digitální knihovně
BibTex
@inproceedings{BUT28336,
author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Frank {Jones} and Vratislav {Peřina} and Josef {Zemek}",
title="Physical versus chemical properties of plasma-polymerized a-SiOC:H films",
booktitle="18th International Symposium on Plasma Chemistry",
year="2007",
pages="1--4",
isbn="978-4-9903773-2-8"
}