Detail publikace

Mechanical properties of plasma polymer films

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. MISTRÍK, J. ZEMEK, J.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.

Klíčová slova

mechanical properties

Autoři

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

Rok RIV

2007

Vydáno

13. 12. 2007

Strany od

Strany do

Strany počet

BibTex

@inproceedings{BUT28342,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
  title="Mechanical properties of plasma polymer films",
  booktitle="Lokální mechanické vlastnosti",
  year="2007",
  pages="1--5"
}