Detail publikačního výsledku

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

TRIVEDI, R.; ŠKODA, D.; ČECH, V.

Originální název

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

Anglický název

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.

Anglický abstrakt

The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.

Klíčová slova

plasma polymerization, surface morphology, AFM, nanoindentation

Klíčová slova v angličtině

plasma polymerization, surface morphology, AFM, nanoindentation

Autoři

TRIVEDI, R.; ŠKODA, D.; ČECH, V.

Vydáno

13.12.2007

Kniha

New Perspectives of Plasma Science and Technology (CD medium)

Strany od

1

Strany do

2

Strany počet

2

BibTex

@inproceedings{BUT28347,
  author="Rutul Rajendra {Trivedi} and David {Škoda} and Vladimír {Čech}",
  title="AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer",
  booktitle="New Perspectives of Plasma Science and Technology (CD medium)",
  year="2007",
  pages="1--2"
}