Detail publikačního výsledku

Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.

Originální název

Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

Anglický název

Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.

Anglický abstrakt

The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.

Klíčová slova v angličtině

thin films, plasma polymerization, FTIR, ESCA/XPS, scratch test, modulus

Autoři

BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.

Vydáno

01.01.2001

Nakladatel

GREMI, CNRS/University of Orleans

Místo

Orleans, France

Kniha

15th Int. Symposium on Plasma Chemistry

Strany od

1747

Strany počet

7

BibTex

@inproceedings{BUT3791,
  author="Radka {Bálková} and Radek {Přikryl} and Ota {Salyk}",
  title="Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power",
  booktitle="15th Int. Symposium on Plasma Chemistry",
  year="2001",
  pages="7",
  publisher="GREMI, CNRS/University of Orleans",
  address="Orleans, France"
}