Detail publikačního výsledku

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

ČECH, V.

Originální název

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

Anglický název

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.

Anglický abstrakt

Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.

Klíčová slova v angličtině

thin films, plasma polymerization,thermogravimetric analysis, FTIR, ESCA/XPS

Autoři

ČECH, V.

Vydáno

01.01.2001

ISSN

0021-8995

Periodikum

JOURNAL OF APPLIED POLYMER SCIENCE

Svazek

82

Číslo

9

Stát

Spojené státy americké

Strany od

2106

Strany počet

7

BibTex

@article{BUT39848,
  author="Vladimír {Čech}",
  title="Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization",
  journal="JOURNAL OF APPLIED POLYMER SCIENCE",
  year="2001",
  volume="82",
  number="9",
  pages="7",
  issn="0021-8995"
}