Detail publikačního výsledku
Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization
ČECH, V.
Originální název
Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization
Anglický název
Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization
Druh
Článek recenzovaný mimo WoS a Scopus
Originální abstrakt
Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.
Anglický abstrakt
Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.
Klíčová slova v angličtině
thin films, plasma polymerization,thermogravimetric analysis, FTIR, ESCA/XPS
Autoři
ČECH, V.
Vydáno
01.01.2001
ISSN
0021-8995
Periodikum
JOURNAL OF APPLIED POLYMER SCIENCE
Svazek
82
Číslo
9
Stát
Spojené státy americké
Strany od
2106
Strany počet
7
BibTex
@article{BUT39848,
author="Vladimír {Čech}",
title="Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization",
journal="JOURNAL OF APPLIED POLYMER SCIENCE",
year="2001",
volume="82",
number="9",
pages="7",
issn="0021-8995"
}