Detail publikačního výsledku

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; JONES, F.; BEHZADI, S.

Originální název

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

Anglický název

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Anglický abstrakt

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Klíčová slova

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Klíčová slova v angličtině

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Autoři

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; JONES, F.; BEHZADI, S.

Rok RIV

2011

Vydáno

11.03.2005

Nakladatel

Elsevier

Místo

Germany, GAPA

ISSN

0257-8972

Periodikum

SURFACE & COATINGS TECHNOLOGY

Svazek

2005

Číslo

200

Stát

Švýcarská konfederace

Strany od

468

Strany do

471

Strany počet

4

BibTex

@article{BUT45809,
  author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Frank {Jones} and Shasa {Behzadi}",
  title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
  journal="SURFACE & COATINGS TECHNOLOGY",
  year="2005",
  volume="2005",
  number="200",
  pages="468--471",
  issn="0257-8972"
}