Detail publikačního výsledku

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

KONTÁROVÁ, S.; ČECH, V.

Originální název

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

Anglický název

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

Druh

Abstrakt

Originální abstrakt

Well-defined multilayered films were deposited from tetravinylsilane combining individual layers polymerized at different powers. A realistic model of the multilayer structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 500 - 25 nm, and corresponded to those of the single layer.

Anglický abstrakt

Well-defined multilayered films were deposited from tetravinylsilane combining individual layers polymerized at different powers. A realistic model of the multilayer structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 500 - 25 nm, and corresponded to those of the single layer.

Klíčová slova

Multilayer, plasma polymerization, ellipsometry, refractive index, extinction coefficient

Klíčová slova v angličtině

Multilayer, plasma polymerization, ellipsometry, refractive index, extinction coefficient

Autoři

KONTÁROVÁ, S.; ČECH, V.

Rok RIV

2011

Vydáno

27.12.2010

Kniha

PSE 2010

Strany od

1

Strany do

1

Strany počet

1

BibTex

@misc{BUT60978,
  author="Soňa {Kontárová} and Vladimír {Čech}",
  title="Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power",
  booktitle="PSE 2010",
  year="2010",
  edition="1",
  pages="1--1",
  note="Abstract"
}