A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation

A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation

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The deposition of a-Si:H by electron beam evaporation and ion beam hydrogenation is described. The films are characterized by density, hydrogen content and refractive index and by SIMS and AES analysis. The transport properties were determined by conductivity and photoconductivity measurements and using the temperature modulated space charge limited currents method (TM-SCLC)

The deposition of a-Si:H by electron beam evaporation and ion beam hydrogenation is described. The films are characterized by density, hydrogen content and refractive index and by SIMS and AES analysis. The transport properties were determined by conductivity and photoconductivity measurements and using the temperature modulated space charge limited currents method (TM-SCLC)

amorphous hydrogenated silicon, evaporation, ion beam

SALYK, O., SCHAUER, F., ZMEŠKAL, O., ZUBÍK, K., POLCER, J., BOUŠEK, J.

01.09.1989

Užhorod

IX. conf. Non-Crystalline Semiconductors 89

III. -114