Detail publikačního výsledku
Thermal desorption spectroscopy of hydrogen from a-Si:H
SCHAUER, F., SALYK, O.
Originální název
Thermal desorption spectroscopy of hydrogen from a-Si:H
Anglický název
Thermal desorption spectroscopy of hydrogen from a-Si:H
Druh
Stať ve sborníku v databázi WoS či Scopus
Originální abstrakt
The thermal desorption spectroscopy is a modern analytical method for organic substances, but it can be used in special cases for anorganic analysis, e.g. for hydrogen asses in amorphous hydrogenated silicon. It helps to evaluate the concentration of gas elements or substances in bulk solids or thin solid films, their bonding energy and structure of crystalline or amorphous network. This method was utilised for the amorphous hydrogenated silicon analysis
Anglický abstrakt
The thermal desorption spectroscopy is a modern analytical method for organic substances, but it can be used in special cases for anorganic analysis, e.g. for hydrogen asses in amorphous hydrogenated silicon. It helps to evaluate the concentration of gas elements or substances in bulk solids or thin solid films, their bonding energy and structure of crystalline or amorphous network. This method was utilised for the amorphous hydrogenated silicon analysis
Klíčová slova v angličtině
amorphous hydrohenated silicon, hydrogen, concentration, desorption
Autoři
SCHAUER, F., SALYK, O.
Vydáno
01.07.1993
Místo
Liptovský MIkuláš
Kniha
Conference Thin Films
Strany od
51
BibTex
@inproceedings{BUT6391,
author="František {Schauer} and Ota {Salyk}",
title="Thermal desorption spectroscopy of hydrogen from a-Si:H",
booktitle="Conference Thin Films",
year="1993",
address="Liptovský MIkuláš"
}