Detail publikačního výsledku
Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane
ČECH, V.; GORUPPA, A.; VANĚK, J.; JONES, F.
Originální název
Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane
Anglický název
Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane
Druh
Stať ve sborníku v databázi WoS či Scopus
Originální abstrakt
Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.
Anglický abstrakt
Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.
Klíčová slova v angličtině
VTEO, pulsed plasma, vinyltriethoxysilane, Young modulus
Autoři
ČECH, V.; GORUPPA, A.; VANĚK, J.; JONES, F.
Vydáno
01.01.2003
Nakladatel
Department of chemistry, University of Bari
Místo
Bari
Kniha
16th International Symposium on Plasma Chemistry
Strany od
461
Strany počet
6
Plný text v Digitální knihovně
BibTex
@inproceedings{BUT8362,
author="Vladimír {Čech} and Alexander {Goruppa} and Jan {Vaněk} and Frank {Jones}",
title="Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane",
booktitle="16th International Symposium on Plasma Chemistry",
year="2003",
pages="6",
publisher="Department of chemistry, University of Bari",
address="Bari"
}