Detail publikace

Layered a-CSi:H/a-CSiO:H nanocomposites

BRÁNECKÝ, M. ČECH, V.

Originální název

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

Layered nanocomposites with a controlled distribution of mechanical properties across the nanostructure were constructed from oxygen-free (a-CSi:H) and oxygen-bound (a-CSiO:H) individual layers. These were deposited at different power from pure tetravinylsilane and tetravinylsilane in a mixture with oxygen gas using plasma-enhanced chemical vapor deposition operating in pulsed mode. Dynamic nanoindentation (Modulus Mapping) was employed to characterize the distribution of mechanical properties across the layered nanocomposites. XPS depth profiling using argon gas cluster ion beams was used to determine the atomic concentration of carbon, silicon, and oxygen in the individual layers forming the nanocomposite. The high energy-resolution XPS spectra (C 1s, Si 2p, and O 1s) were analyzed to gain more insight into bonding species formed in layered nanocomposite.

Klíčová slova

Layered nanocomposite; mechanical properties; chemical properties; PECVD

Autoři

BRÁNECKÝ, M.; ČECH, V.

Vydáno

14. 11. 2019

Místo

Luxembourg

Strany počet

BibTex

@misc{BUT160081,
  author="Martin {Bránecký} and Vladimír {Čech}",
  title="Layered a-CSi:H/a-CSiO:H nanocomposites",
  booktitle="6th International Plasma Science and Interfaces workshop
Luxembourg
",
  year="2019",
  pages="1",
  address="Luxembourg",
  note="abstract"
}