Detail publikace

Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. MISTRÍK, J. ZEMEK, J.

Originální název

Typ

přednáška

Jazyk

angličtina

Originální abstrakt

Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD 6th Asian-European International Conference on Plasma Surface Engineering, September 23 - October 1, 2007, Yasuragi-Ioujima Nagasaki, Japan

Autoři

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

Vydáno

13. 12. 2007

BibTex

@misc{BUT64764,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
  title="Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD",
  year="2007",
  note="lecture"
}